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Conference

Structural Charachterization Of Aln Thin Films Obtained On Silicon Surface By Pe-Ald

Subjects: atomic layer deposition; aluminum nitride; thin films

  • Source: Proceedings II of the 26st Conference STUDENT EEICT 2020: Selected Papers. s. 197-202. ISBN 978-80-214-5868-0

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  • 1-5 of  5 نتائج ل ""FOURIER transform infrared spectroscopy""